Low Thermal Expansion Ceramics (Cordierite)
TOTO's low thermal expansion ceramics have light weight and low CTE to contribute to improvements in overall equipment performance.
Our diffusion bonding makes it possible to mold complex hollow shapes.
Non-pore material available.
Sample dimension : 450 × 450 × 60 mm
Diffusion Bonding
Application
- ■ Tables and guides for high-precision positioning stage, especially for semiconductor manufacturing equipments.
- ■ Minimum-distortion-allowed parts near heat source such as mirror holders and mirror bases.
Properties
| Material | TOTO's Cordierite | TOTO's Cordierite (HIP) | Low CTE Glass | Low CTE Alloy |
|---|---|---|---|---|
| CTE ×10-6/℃ | 0.0 | 0.0 | 0.0 | 0.0 |
| Young's Modulus GPa | 137 | 143 | 90 | 150 |
| Bulk Density | 2.55 | 2.58 | 2.53 | 8.00 |
| Specific Rigidity (Young's Modulus / Bulk Density) | 54 | 55 | 36 | 19 |
Precision Ceramic Components
Large Ceramics
High-Rigidity Ceramics
(SiSiC)
Electrically Conductive
Ceramics
Low Thermal Expansion Ceramics (Cordierite)