Precision Ceramic Components
TOTO's Ceramics are utilized for various purposes in the fields of semiconductor and LCD manufacturings. We have gained achievements and reliability for its high performance particularly for ultra-high-precision processings, metrology, and inspection systems.
TOTO's Ceramics has achieved world class LCD sizes using our original moldings.
For semiconductor-processings for which high precision and high throughput are demanded, TOTO will meet customers' demands with new materials.
Large CeramicsApplication : processings and inspection systems for LCD.
(Silicon-Infiltrated Silicon Carbide)Application : processings and conveyance systems for semiconductor, FPD manufacturing equipment and precision mechanical equipment. For high precision semiconductor and FPD manufacturing equipment.
Electrically Conductive CeramicsApplication : Antielectrical discharge in tables and beams for high accuracy positioning system.
Low Thermal Expansion Ceramics (Cordierite)Application : mirrors for semiconductor processings and inspections peripheral parts for semiconductor wafers and reticles.