Large Ceramics
TOTO's proprietary ceramic forming techniques enable the production of monolithic, hollow-structure ceramic components.
With their large size and high rigidity, TOTO's ceramic beams achieve reductions in overall equipment weight as well as enhanced equipment throughput performance.
Hollow Beam
Flat Plate
| Product | Outer Size | Characteristics |
|---|---|---|
| Flat Plate | 1,700*750mm | High specific rigidity, High accuracy |
| Hollow Beam | 3,800mm in length | High specific rigidity, High accuracy, Light weight |
Ceramic beam's example
cross section example
- ■Material
- Alumina 87%
(TOTO's material : AC270) - ■Finish
Fine grinding finish, Lapping finish also available
Applications
- ■ Flat Panel Display(LCD、PDP、OEL) : Guide axis for super precision positioning stage and movable table
- ■ Table for glass adsorption (chucks) for FPD substrate
- ■ Precision inspection, evaluation device associated components
