High-Rigidity Ceramics
(Silicon-Infiltrated Silicon Carbide - SiSiC)

Our high-rigidity ceramics consist of compound materials based on Silicopn Carbide with additional Silicon infiltration.
Our reaction bonding process makes it possible to mold complex hollow shapes.
SiSiC's low outgassing also makes it ideal for use in a vacuum environment.

  • Sample dimension : 300 × 450 × 50 mm

    Sample dimension : 300 × 450 × 50 mm

  • Reaction Bonding

    Reaction Bonding

Applications

  • ■ Tables and guide shafts for high-precision positioning systems
  • ■ Mirror substrates and its peripherals
  • ■ Close examination, parts for inspection systems

Properties

Material High-Rigidity Ceramics Si-SiC Alumina AI2O399.7% SiC Granite
CTE ×10-6/℃ 2.3 5.4 2.6 5.0
Young's Modulus Gpa 360 370 400 60-100
Bulk Density 3.0 3.9 3.1 2.9
Specific Rigidity (Young's Modulus / Bulk Density) 120 95 129 20-35