(Silicon-Infiltrated Silicon Carbide - SiSiC)
Our high-rigidity ceramics consist of compound materials based on Silicopn Carbide with additional Silicon infiltration.
Our reaction bonding process makes it possible to mold complex hollow shapes.
SiSiC's low outgassing also makes it ideal for use in a vacuum environment.
- ■ Tables and guide shafts for high-precision positioning systems
- ■ Mirror substrates and its peripherals
- ■ Close examination, parts for inspection systems/li>
|Material||High-Rigidity Ceramics Si-SiC||Alumina AI2O399.7％||SiC||Granite|
|Young's Modulus Gpa||360||370||400||60-100|
|Specific Rigidity (Young's Modulus / Bulk Density)||120||95||129||20-35|