Engineering Ceramics
TOTO's Ceramics are utilized for various purposes in the fields of semiconductor and LCD manufacturings. We have gained achievements and reliability for its high performance particularly for ultra-high-precision processings, metrology, and inspection systems.
TOTO's Ceramics has achieved world class LCD sizes using our original moldings.
For semiconductor-processings for which high precision and high throughput are demanded, TOTO will meet customers' demands with new materials.
Large CeramicsApplication : processings and inspection systems for LCD.
High-Rigidity Ceramics
(Silicon-Infiltrated Silicon Carbide)Application : processings and conveyance systems for semiconductor, FPD manufacturing equipment and precision mechanical equipment. For high precision semiconductor and FPD manufacturing equipment.
Electrically Conductive CeramicsApplication : Antielectrical discharge in tables and beams for high accuracy positioning system.