Air Bearing Product Introduction
Single Axis Air Bearing
We carry a variety of standard air bearing designs.
Stack-type for the XY-stage（ASSEMBLE IMAGE）
Accuracy grade example : 0 grade Straightness
- vertical direction
- （Stroke × 0.08 / 100）μm
- Horizontal direction
- （Stroke × 0.05 / 100）μm
Example:
300 travel length vertical direction straightness of 0 grade.
300 × 0.08 / 100 = 0.24 therefore 0.24 υm / 300 mm
300 travel length vertical direction straightness of 0 grade.
300 × 0.08 / 100 = 0.24 therefore 0.24 υm / 300 mm
| Travel length | Grade 0 |
|---|---|
| 100mm | 4 |
| 300mm | 7 |
| 500mm | 10 |
Ultra-Low-Oscillation - Air-Bearing Stage
TOTO offers an ultra-low-oscillation air-bearing stage for extreme precision applications requiring nanometer placement accuracies. Our unique air-bearing design provides a stage system with oscillation values of 1 nm or less. Ultra-low Oscillation Air-Bearing Stages will meet the most demanding placement and inspection specifications.
Horizontal vibration data of air-bearing stage (B4 type) with air and without air.
Delta = 0.09 nm
Delta = 0.09 nm
