Electrostatic Chucks
TOTO's electrostatic chucks (ESCs) contribute to state-of-the-art semiconductor manufacturing processes by achieving superior durability and low backside particle contamination because of our proven design and analysis capabilities, high-precision fabrication techniques and an integrated management system that is consistent from raw materials to finished products.
Principles and Features of adsorption power
Principles of adsorption power
J-R ESC
Strong adsorption power even when applying low voltage
Coulombic ESC
・Adsorption power is not influenced by changes in process temperatures
Adsorption power of J-R and Coulombic ESC
Features of TOTO's ESC
Advantages of TOTO's ESC
- ・Materials
- TOTO's high plasma resistant Al2 O3 materials achieve high durability.
- Low backside particle contamination
- TOTO can suggest any kind of preferred materials.
- ・Proposals of design
- Analysis capabilities (structural, thermal conductance, and thermal stress analysis)
- ・Mass-production manufacturing capability
- TOTO can achieve turnkey ESC (ceramic, heater, cooling jacket).
- TOTO can meet the requirement of 450 mm ESC.
TOTO's ESC can control wafer temperature according to customer's requirement thanks to TOTO's materials, designing and mass-production manufacturing capabilities.
Example of plasma irradiation examination
TOTO's material (AP900R) has higher plasma resistance than typical high purity Al2O3（99.9% purity).