Air Bearing Product Introduction
Single Axis Air Bearing
We carry a variety of standard air bearing designs.
Accuracy grade example
|（Stroke × 0.08 / 100）μm|
|Horizontal direction||（Stroke × 0.05 / 100）μm|
300 travel length vertical direction straightness of 0 grade.
300 × 0.08 / 100 = 0.24 therefore 0.24 υm / 300 mm
Stack-type for the XY-stage
Angular motion(Accuracy grade example)
Angular motion accuracy ( Pitch.Yaw ) μrad
|Travel ｌength||Grade 0|
Ultra-Low-Oscillation - Air-Bearing Stage
ＴＯＴＯ offers an ultra-low-oscillation air-bearing stage for extreme precision applications requiring nanometer placement accuracies. Our unique air-bearing design provides a stage system with oscillation values of 1 nm or less. Ultra-low Oscillation Air-Bearing Stages will meet the most demanding placement and inspection specifications.
Horizontal vibration data of air-bearing stage (B4 type) with air and without air.
Delta = 0.09 nm
Ported Air System - Air-Bearing Stage
ＴＯＴＯ’s ported air bearing systems significantly reduce airflow fluctuations in optical measurement stages. The port system is designed within the bearing guide to optimize airflow, minimizing oscillations upon the moving table. When increased accuracy in a measurement or inspection system is needed, ＴＯＴＯ's Air-Bearing Stages with Ported Air System meet the specification.
Laser measurement data with/without Ported Air system.
（Measured under ＴＯＴＯ conditions.）